High Pressure and Temperature Nitrogen Heating

High Pressure and Temperature Nitrogen Heating

The vacuum pump is capable of direct exposure to a wide range of gases from the process tool. By introducing an inert gas such as nitrogen at a controlled temperature and flow, the process gas can be maintained at a controlled temperature, which will reduce the amount of reaction, condensation and sublimation that can cause byproduct buildup within the lines, saving maintenance time and expensive tool downtime.
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Product Description

 

High Pressure and Temperature Nitrogen Heating

The vacuum pump is capable of direct exposure to a wide range of gases from the process tool. By introducing an inert gas such as nitrogen at a controlled temperature and flow, the process gas can be maintained at a controlled temperature, which will reduce the amount of reaction, condensation and sublimation that can cause byproduct buildup within the lines, saving maintenance time and expensive tool downtime. Most LPCVD, Metal Etch, CVD, PECVD, FPD and ALD users can benefit from heated dilution solutions to reduce unwanted temperature reactions during the process.

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High Pressure and Temperature Nitrogen Heating is designed for economy in the most demanding applications. Our patented heater designs help you reduce the size, weight and cost of your equipment or process. From ultra-pure PTFE heaters to industrial process heaters, Infinity has the right equipment at a lower price. If standard products are not suitable, our flexible design practices also allow you to create a heater that best suits your application.

Hot gas control system directly injects hot gas into a chamber or pipe, there is no slow heat soak time associated with heater jackets and cartridge heaters. The beneficial heat and dilution of the nitrogen gas has immediate and maximum effect. Hot gas system eliminates internal condensation, cold spots, and maintains effluent temperature.

Hot gas control system directly injects hot gas into a chamber or pipe, there is no slow heat soak time associated with heater jackets and cartridge heaters. The beneficial heat and dilution of the nitrogen gas has immediate and maximum effect. Hot gas system eliminates internal condensation, cold spots, and maintains effluent temperature.

For all applications which require clean designs for lab, pharma and semiconductor production.

 

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Exhaust line

 

Hot N2 can keep whole pipe in high temp to prevent by-products condensed in pipe

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Dilute N2

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Hot N2 can keep dilute N2 at high temp to prevent condensed around dilute N2 inlet

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Inlet of scrubber

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Prevent powder condensed at inlet of scrubber

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Hot N2 Heater
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Hot N2 Heater & VT N2 Swirl Supply Unit
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VT N2 Swirl Supply Unit

Our Certificate

 

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